Double-step gas cluster ion beam smoothing

Vasiliy Pelenovich; Zeng Xiao-Mei; Luo Jin-Bao; Rakhim Rakhimov; Zuo Wen-Bin; Zhang Xiang-Yu; Tian Can-Xin; Zou Chang-Wei; Fu De-Jun; Yang Bing

doi:10.7498/aps.70.20201454

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Vasiliy Pelenovich, Zeng Xiao-Mei, Luo Jin-Bao, Rakhim Rakhimov, Zuo Wen-Bin, Zhang Xiang-Yu, Tian Can-Xin, Zou Chang-Wei, Fu De-Jun, Yang Bing. Double-step gas cluster ion beam smoothingJ. Acta Physica Sinica, 2021, 70(5): 053601. DOI: 10.7498/aps.70.20201454

Citation:

Vasiliy Pelenovich, Zeng Xiao-Mei, Luo Jin-Bao, Rakhim Rakhimov, Zuo Wen-Bin, Zhang Xiang-Yu, Tian Can-Xin, Zou Chang-Wei, Fu De-Jun, Yang Bing. Double-step gas cluster ion beam smoothingJ. Acta Physica Sinica, 2021, 70(5): 053601. DOI: 10.7498/aps.70.20201454

Citation:

Vasiliy Pelenovich, Zeng Xiao-Mei, Luo Jin-Bao, Rakhim Rakhimov, Zuo Wen-Bin, Zhang Xiang-Yu, Tian Can-Xin, Zou Chang-Wei, Fu De-Jun, Yang Bing. Double-step gas cluster ion beam smoothingJ. Acta Physica Sinica, 2021, 70(5): 053601. DOI: 10.7498/aps.70.20201454