Li Ti-Jun, Cui Sui-Han, Liu Liang-Liang, Li Xiao-Yuan, Wu Zhong-Can, Ma Zheng-Yong, Ricky K. Y. Fu, Tian Xiu-Bo, Paul K. Chu, Wu Zhong-Zhen. Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathodeJ. Acta Physica Sinica, 2021, 70(4): 045202. DOI: 10.7498/aps.70.20201540