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Huang Jiu-Huan, Gao Fei, Wang You-Nian. Effect of pressure on discharge mode transition in radio-frequency capacitively coupled micro-beam plasmasJ. Acta Physica Sinica, 2021, 70(7): 075205. DOI: 10.7498/aps.70.20201716
Citation: Huang Jiu-Huan, Gao Fei, Wang You-Nian. Effect of pressure on discharge mode transition in radio-frequency capacitively coupled micro-beam plasmasJ. Acta Physica Sinica, 2021, 70(7): 075205. DOI: 10.7498/aps.70.20201716
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Effect of pressure on discharge mode transition in radio-frequency capacitively coupled micro-beam plasmas

Acta Phys. Sin., 2021, 70(7): 075205.
DOI: 10.7498/aps.70.20201716
CSTR: 32037.14.aps.70.20201716
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