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中国物理学会期刊
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Wang Yi-Lin, Lan Zi-Xuan, Du Hui-Wei, Zhao Lei, Ma Zhong-Quan. Phosphorus oxides in heavily doped polysilicon filmsJ. Acta Physica Sinica, 2022, 71(18): 188201. DOI: 10.7498/aps.71.20220706
Citation: Wang Yi-Lin, Lan Zi-Xuan, Du Hui-Wei, Zhao Lei, Ma Zhong-Quan. Phosphorus oxides in heavily doped polysilicon filmsJ. Acta Physica Sinica, 2022, 71(18): 188201. DOI: 10.7498/aps.71.20220706
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Phosphorus oxides in heavily doped polysilicon films

Acta Phys. Sin., 2022, 71(18): 188201.
DOI: 10.7498/aps.71.20220706
CSTR: 32037.14.aps.71.20220706
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