He Jian, Jia Yan-Wei, Tu Ju-Ping, Xia Tian, Zhu Xiao-Hua, Huang Ke, An Kang, Liu Jin-Long, Chen Liang-Xian, Wei Jun-Jun, Li Cheng-Ming. Generation of shallow nitrogen-vacancy centers in diamond with carbon ion implantationJ. Acta Physica Sinica, 2022, 71(18): 188102. DOI: 10.7498/aps.71.20220794