Reaction dynamic process of low pressure discharge plasma in microwave resonant cavity

Chen Ze-Yu; Peng Yu-Bin; Wang Rui; He Yong-Ning; Cui Wan-Zhao

doi:10.7498/aps.71.20221385

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Chen Ze-Yu, Peng Yu-Bin, Wang Rui, He Yong-Ning, Cui Wan-Zhao. Reaction dynamic process of low pressure discharge plasma in microwave resonant cavityJ. Acta Physica Sinica, 2022, 71(24): 240702. DOI: 10.7498/aps.71.20221385

Citation:

Chen Ze-Yu, Peng Yu-Bin, Wang Rui, He Yong-Ning, Cui Wan-Zhao. Reaction dynamic process of low pressure discharge plasma in microwave resonant cavityJ. Acta Physica Sinica, 2022, 71(24): 240702. DOI: 10.7498/aps.71.20221385

Citation:

Chen Ze-Yu, Peng Yu-Bin, Wang Rui, He Yong-Ning, Cui Wan-Zhao. Reaction dynamic process of low pressure discharge plasma in microwave resonant cavityJ. Acta Physica Sinica, 2022, 71(24): 240702. DOI: 10.7498/aps.71.20221385