Hybrid simulation of radio frequency biased inductively coupled Ar/O<sub>2</sub>/Cl<sub>2</sub> plasmas

Tong Lei; Zhao Ming-Liang; Zhang Yu-Ru; Song Yuan-Hong; Wang You-Nian

doi:10.7498/aps.73.20231369

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Tong Lei, Zhao Ming-Liang, Zhang Yu-Ru, Song Yuan-Hong, Wang You-Nian. Hybrid simulation of radio frequency biased inductively coupled Ar/O2/Cl2 plasmasJ. Acta Physica Sinica, 2024, 73(4): 045201. DOI: 10.7498/aps.73.20231369

Citation:

Tong Lei, Zhao Ming-Liang, Zhang Yu-Ru, Song Yuan-Hong, Wang You-Nian. Hybrid simulation of radio frequency biased inductively coupled Ar/O2/Cl2 plasmasJ. Acta Physica Sinica, 2024, 73(4): 045201. DOI: 10.7498/aps.73.20231369

Citation:

Tong Lei, Zhao Ming-Liang, Zhang Yu-Ru, Song Yuan-Hong, Wang You-Nian. Hybrid simulation of radio frequency biased inductively coupled Ar/O2/Cl2 plasmasJ. Acta Physica Sinica, 2024, 73(4): 045201. DOI: 10.7498/aps.73.20231369