Uniformity optimization of ion beam sputtering coating equipment based on strong current ion source

Li Sang-Ya; Zhang Ai-Lin; Xu Xin; Lü Tao; Wang Shi-Kang; Luo Qing

doi:10.7498/aps.73.20231491

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Li Sang-Ya, Zhang Ai-Lin, Xu Xin, Lü Tao, Wang Shi-Kang, Luo Qing. Uniformity optimization of ion beam sputtering coating equipment based on strong current ion sourceJ. Acta Physica Sinica, 2024, 73(5): 058101. DOI: 10.7498/aps.73.20231491

Citation:

Li Sang-Ya, Zhang Ai-Lin, Xu Xin, Lü Tao, Wang Shi-Kang, Luo Qing. Uniformity optimization of ion beam sputtering coating equipment based on strong current ion sourceJ. Acta Physica Sinica, 2024, 73(5): 058101. DOI: 10.7498/aps.73.20231491

Citation:

Li Sang-Ya, Zhang Ai-Lin, Xu Xin, Lü Tao, Wang Shi-Kang, Luo Qing. Uniformity optimization of ion beam sputtering coating equipment based on strong current ion sourceJ. Acta Physica Sinica, 2024, 73(5): 058101. DOI: 10.7498/aps.73.20231491