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Chen Jin-Feng, Zhu Lin-Fan. Electron collision cross section data in plasma etching modelingJ. Acta Physica Sinica, 2024, 73(9): 095201. DOI: 10.7498/aps.73.20231598
Citation: Chen Jin-Feng, Zhu Lin-Fan. Electron collision cross section data in plasma etching modelingJ. Acta Physica Sinica, 2024, 73(9): 095201. DOI: 10.7498/aps.73.20231598
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Electron collision cross section data in plasma etching modeling

Acta Phys. Sin., 2024, 73(9): 095201.
DOI: 10.7498/aps.73.20231598
CSTR: 32037.14.aps.73.20231598
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