Influence of annealing temperature on the performance of radio frequency magnetron sputtered Sn-doped Ga<sub>2</sub>O<sub>3</sub> films and its solar-blind photodetector

XU Yihong; FAN Weihang; WANG Chen

doi:10.7498/aps.74.20240972

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XU Yihong, FAN Weihang, WANG Chen. Influence of annealing temperature on the performance of radio frequency magnetron sputtered Sn-doped Ga2O3 films and its solar-blind photodetectorJ. Acta Physica Sinica, 2025, 74(2): 028104. DOI: 10.7498/aps.74.20240972

Citation:

XU Yihong, FAN Weihang, WANG Chen. Influence of annealing temperature on the performance of radio frequency magnetron sputtered Sn-doped Ga2O3 films and its solar-blind photodetectorJ. Acta Physica Sinica, 2025, 74(2): 028104. DOI: 10.7498/aps.74.20240972

Citation:

XU Yihong, FAN Weihang, WANG Chen. Influence of annealing temperature on the performance of radio frequency magnetron sputtered Sn-doped Ga2O3 films and its solar-blind photodetectorJ. Acta Physica Sinica, 2025, 74(2): 028104. DOI: 10.7498/aps.74.20240972