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Titanium and silicon co-doped diamond-like carbon films are deposited on Si substrates by middle-frequency magnetron sputtering Ti80Si20 composite target. The influences of deposition temperature on the growth rate, chemical composition, structure, surface and mechanical properties of the film are investigated. The results show that the growth rate of the film decreases as substrate temperature increases. With the increasing of substrate temperature, Ti and Si atom content values in the film increase, while C atom content value decreases. At high temperatures, the film has low sp3C fraction, surface contact angle, compressive stress, and high hardness, and elastic modulus. The influences of deposition temperature on the growth and bonding structure of the film are analyzed in view of the subplantation growth model. The changes in surface and mechanical properties are correlated with the growth mechanism and microstructures of the film.
[1] Kao W H, Su Y L, Yao S H, Huang H C 2010 Surf. Coat. Tech. 204 1277
[2] Wang Y Y, Li Y A, Xu J S, Gu G R 2012 Chin. Phys. B 21 087902
[3] Wang C B, Shi J, Geng Z R, Zhang J Y 2012 Chin. Phys. Lett. 29 056201
[4] Zhao D C, Ren N, Ma Z J, Qiu J W, Xiao G J, Wu S H 2008 Acta Phys. Sin. 57 1935 (in Chinese) [赵栋才, 任妮, 马占吉, 邱家稳, 肖更竭, 武生虎 2008 物理学报 57 1935]
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[6] Jiang J, Hao J, Pang X, Wang P, Liu W 2010 Diamond Relat. Mater. 19 1172
[7] Liu X, Yang J, Hao J, Zheng J, Gong Q, Liu W 2012 Adv. Mater. 24 4614
[8] Y X, Wang C B, L Y, Yu D Y 2006 Diamond Relat. Mater. 15 1223
[9] Pei Y T, Chen C Q, Shaha K P, De Hosson J T M, Bradley J W, Voronin S A, Čada M 2008 Acta Mater. 56 696
[10] Sattel S, Robertson J, Ehrhardt H 1997 J. Appl. Phys. 82 4566
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[12] Jiang J, Hao J, Wang P, Liu W 2010 J. Appl. Phys. 108 033510
[13] Li G, Xia L F 2001 Thin Solid Films 396 16
[14] Lewin E, Persson P O Å, Lattemann M, Stber M, Gorgoi M, Sandell A, Ziebert C, Schäfers F, Braun W, Halbritter J, Ulrich S, Eberhardt W, Hultman L, Siegbahn H, Svensson S, Jansson U 2008 Surf. Coat. Technol. 202 3563
[15] Mei X X, Liu Z M, Ma T C 2003 Chin. J. Vacuum Sci. Technol. 23 226 (in Chinese) [梅显秀, 刘振民, 马腾才 2003 真空科学与技术 23 226]
[16] Lifshitz Y, Lempert G D, Grossman E, Avigal I, Uzan-Saguy C, Kalish R, Kulik J, Marton D, Rabalais J W 1995 Diamond Relat. Mater. 4 318
[17] Chowdhury S, Laugier M T, Rahman I Z 2004 Thin Solid Films 447–448 174
[18] Chu P K, Li L 2006 Mater. Chem. Phys. 96 253
[19] Varma A, Palshin V, Meletis E I 2001 Surf. Coat. Tech. 148 305
[20] Rybachuk M, Bell J M 2007 Thin Solid Films 515 7855
[21] Paul R, Das S N, Dalui S Gayen R N, Roy R K, Bhar R, Pal A K 2008 J. Phys. D: Appl. Phys. 41 055309
[22] Wang P, Wang X, Xu T, Liu W, Zhang J 2007 Thin Solid Films 515 6899
[23] Ban M, Hasegawa T 2002 Surf. Coat. Tech. 162 1
[24] Wang P 2008 Ph. D. Dissertation (Lanzhou: Lanzhou Institute of Chemical Physics) (in Chinese) [王鹏 2008 博士学位论文 (兰州: 兰州化学物理研究所)]
[25] Forsich C, Heim D, Mueller T 2008 Surf. Coat. Tech. 203 521
[26] Wu W D, Wang F, Li J, Li S Y, Cao L H, Ge F F, Ju X, Tang Y J 2008 High Power Laser Particle Beams 20 769 (in Chinese) [吴卫东, 王锋, 李俊, 李盛印, 曹林洪, 葛芳芳, 巨新, 唐永建 2008 强激光与粒子束 20 769]
[27] Chowdhury S, Laugier M T, Rahman I Z 2004 Thin Solid Films 2004 468 149
[28] Abbas G A, Papakonstantinou P, McLaughlin J A, Weijers-Dall T D M, Elliman R G, Filik J 2005 J. Appl. Phys. 98 103505
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[1] Kao W H, Su Y L, Yao S H, Huang H C 2010 Surf. Coat. Tech. 204 1277
[2] Wang Y Y, Li Y A, Xu J S, Gu G R 2012 Chin. Phys. B 21 087902
[3] Wang C B, Shi J, Geng Z R, Zhang J Y 2012 Chin. Phys. Lett. 29 056201
[4] Zhao D C, Ren N, Ma Z J, Qiu J W, Xiao G J, Wu S H 2008 Acta Phys. Sin. 57 1935 (in Chinese) [赵栋才, 任妮, 马占吉, 邱家稳, 肖更竭, 武生虎 2008 物理学报 57 1935]
[5] Zhao F, Li H X, Ji L, Wang Y J, Zhou H D, Chen J M 2010 Surf. Coat. Tech. 19 342
[6] Jiang J, Hao J, Pang X, Wang P, Liu W 2010 Diamond Relat. Mater. 19 1172
[7] Liu X, Yang J, Hao J, Zheng J, Gong Q, Liu W 2012 Adv. Mater. 24 4614
[8] Y X, Wang C B, L Y, Yu D Y 2006 Diamond Relat. Mater. 15 1223
[9] Pei Y T, Chen C Q, Shaha K P, De Hosson J T M, Bradley J W, Voronin S A, Čada M 2008 Acta Mater. 56 696
[10] Sattel S, Robertson J, Ehrhardt H 1997 J. Appl. Phys. 82 4566
[11] Robertson J 2002 Mater. Sci. Eng. R 37 129
[12] Jiang J, Hao J, Wang P, Liu W 2010 J. Appl. Phys. 108 033510
[13] Li G, Xia L F 2001 Thin Solid Films 396 16
[14] Lewin E, Persson P O Å, Lattemann M, Stber M, Gorgoi M, Sandell A, Ziebert C, Schäfers F, Braun W, Halbritter J, Ulrich S, Eberhardt W, Hultman L, Siegbahn H, Svensson S, Jansson U 2008 Surf. Coat. Technol. 202 3563
[15] Mei X X, Liu Z M, Ma T C 2003 Chin. J. Vacuum Sci. Technol. 23 226 (in Chinese) [梅显秀, 刘振民, 马腾才 2003 真空科学与技术 23 226]
[16] Lifshitz Y, Lempert G D, Grossman E, Avigal I, Uzan-Saguy C, Kalish R, Kulik J, Marton D, Rabalais J W 1995 Diamond Relat. Mater. 4 318
[17] Chowdhury S, Laugier M T, Rahman I Z 2004 Thin Solid Films 447–448 174
[18] Chu P K, Li L 2006 Mater. Chem. Phys. 96 253
[19] Varma A, Palshin V, Meletis E I 2001 Surf. Coat. Tech. 148 305
[20] Rybachuk M, Bell J M 2007 Thin Solid Films 515 7855
[21] Paul R, Das S N, Dalui S Gayen R N, Roy R K, Bhar R, Pal A K 2008 J. Phys. D: Appl. Phys. 41 055309
[22] Wang P, Wang X, Xu T, Liu W, Zhang J 2007 Thin Solid Films 515 6899
[23] Ban M, Hasegawa T 2002 Surf. Coat. Tech. 162 1
[24] Wang P 2008 Ph. D. Dissertation (Lanzhou: Lanzhou Institute of Chemical Physics) (in Chinese) [王鹏 2008 博士学位论文 (兰州: 兰州化学物理研究所)]
[25] Forsich C, Heim D, Mueller T 2008 Surf. Coat. Tech. 203 521
[26] Wu W D, Wang F, Li J, Li S Y, Cao L H, Ge F F, Ju X, Tang Y J 2008 High Power Laser Particle Beams 20 769 (in Chinese) [吴卫东, 王锋, 李俊, 李盛印, 曹林洪, 葛芳芳, 巨新, 唐永建 2008 强激光与粒子束 20 769]
[27] Chowdhury S, Laugier M T, Rahman I Z 2004 Thin Solid Films 2004 468 149
[28] Abbas G A, Papakonstantinou P, McLaughlin J A, Weijers-Dall T D M, Elliman R G, Filik J 2005 J. Appl. Phys. 98 103505
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