In situ transmission electron microscopy studies on nanomaterials and HfO2-based storage nanodevices

Li Chao; Yao Yuan; Yang Yang; Shen Xi; Gao Bin; Huo Zong-Liang; Kang Jin-Feng; Liu Ming; Yu Ri-Cheng

doi:10.7498/aps.67.20180731

Abstract

Advanced transmission electron microscopy combined with in situ techniques provides powerful ability to characterize the dynamic behaviors of phase transitions, composition changes and potential variations in the nanomaterials and devices under external electric field. In this paper, we review some important progress, in this field, of the explanation of structural transition path caused by the Joule heating in C60 nanowhikers, the clarification of electron storage position in charge trapping memory and the direct evidences of the oxygen vacancy channel and the conductive filament formation in resistive random access memory. These studies could improve an understanding of the basic mechanism of nanomaterial and device performance, and also demonstrate the diversity of the functions of transmission electron microscopy in microelectronic field.

Keywords:

Authors and contacts

1.
Laboratory of Advanced Materials and Electron Microscopy, Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;
2.
School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China;
3.
School of Electronics Engineering and Computer Science, Peking University, Beijing 100871, China;
4.
Key Laboratory of Microelectronics Device and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

Corresponding author: Kang Jin-Feng, rcyu@iphy.ac.cn;kangjf@pku.edu.cn;liuming@ime.ac.cn ; Liu Ming, rcyu@iphy.ac.cn;kangjf@pku.edu.cn;liuming@ime.ac.cn ; Yu Ri-Cheng, rcyu@iphy.ac.cn;kangjf@pku.edu.cn;liuming@ime.ac.cn

Funds: Project supported by the National Key RD Program of China (Grant No. 2016YFA0300701), the National Basic Research Program of China (Grant Nos. 2013CB932904, 2012CB932302, 2010CB934202), and the National Natural Science Foundation of China (Grant Nos. 11374343, 61421005, 11574376, 11174336, 61334007, 10974235, 11274365).

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[38]	Yao Y, Li C, Huo Z L, Liu M, Zhu C X, Gu C Z, Duan X F, Wang Y G, Gu L, Yu R C 2013 Nature Commun. 4 2764
[39]	Jeno C S, Ranganath T R, Jones H S, Chang T T L 1981 IEDM 27 388
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[41]	Shibuya K, Dittmann R, Mi S, Waser R 2010 Adv. Mater. 22 411
[42]	Dimaria D J, Cartier E, Arnold D 1993 J. Appl. Phys. 73 3367
[43]	Su J, Wu E Y 2004 Phys. Rev. Lett. 92 087601
[44]	Xiong K, Robertson J 2005 Microelectron. Eng. 80 408
[45]	Onishi K, Choi R, Kang C S, Cho H J, Kim Y H, Nich R E, Han J, Krishnan S A, Akbar M S, Lee J C 2003 IEEE Trans. Electron Dev. 50 1517
[46]	Houssa M, Pantisano L, Ragnarsson L , Degraeve R, Schram T, Pourtois G, Gendt S D, Groeseneken G, Heyns M M 2006 Mater. Sci. Eng. R 51 37
[47]	Zafar S, Kumar A, Gusev E, Cartier E 2005 IEEE Trans. Device Mat. Re. 5 45
[48]	Valov I, Linn E, Tappertzhofen S, Schmelzer S, van den Hurk J, Lentz F, Waser R 2013 Nat. Commun. 4 1771
[49]	Jang J H, Jung H S, Kim J H, Lee S Y, Hwang C S, Kim M 2011 J. Appl. Phys. 109 023718
[50]	Li C, Yao Y, Shen X, Wang Y G, Li J J, Gu C Z, Yu R C, Liu Q, Liu M 2015 Nano Res. 8 3571
[51]	Liu Q, Long S B, L H B, Wang W, Niu J B, Huo Z L, Chen J N, Liu M 2010 ACS Nano 4 6162
[52]	Tian H, Chen H Y, Gao B, Yu S M, Liang J L, Yang Y, Xie D, Kang J F, Ren T L, Zhang Y G, Wong H S P 2013 Nano Lett. 13 651
[53]	Celano U, Goux L, Degraeve R, Fantini A, Richard O, Bender H, Jurczak M, Vandervorst W 2015 Nano Lett. 15 7970
[54]	Liu Q, Sun J, L H B, Long S B, Yin K B, Wan N, Li Y T, Sun L T, Liu M 2012 Adv. Mater. 24 1844
[55]	Celano U, Goux L, Belmonte A, Opsomer K, Franquet A, Schulze A, Detavernier C, Richard O, Bender H, Jurczak M, Vandervorst W 2014 Nano Lett. 14 2401
[56]	Chen J Y, Huang C W, Chiu C H, Huang Y T, Wu W W 2015 Adv. Mater. 27 5028
[57]	Park G S, Kim Y B, Park S Y, Li X S, Heo S, Lee M J, Chang M, Kwon J H, Kim M, Chung U I, Dittmann R, Waser R, Kim K 2013 Nature Commun. 4 2382
[58]	Miao F, Strachan J P, Yang J J, Zhang M X, Goldfarb I, Torrezan A C, Eschbach P, Kelley R D, Ribeiro G M, Williams R S 2011 Adv. Mater. 23 5633
[59]	Chen J Y, Hsin C L, Huang C W, Chiu C H, Huang Y T, Lin S J, Wu W W, Chen L J 2013 Nano Lett. 13 3671
[60]	Yang Y C, Gao P, Gaba S, Chang T, Pan X Q, Lu W 2012 Nature Commun. 3 732
[61]	Strachan J P, Pickett M D, Yang J J, Aloni S, Kilcoyne A L D, Ribeiro G M, Williams R S 2010 Adv. Mater. 22 3573
[62]	Waser R, Dittmann R, Staikov G, Szot K 2009 Adv. Mater. 21 2632
[63]	Yang Y, L W, Yao Y, Sun J, Gu C, Gu L, Wang Y, Duan X, Yu R 2014 Sci. Rep. 4 3890
[64]	Li C, Gao B, Yao Y, Guan X X, Shen X, Wang Y G, Huang P, Liu L F, Liu X Y, Li J J, Gu C Z, Kang J F, Yu R C 2017 Adv. Mater. 29 1602976

Cited By

[1]	Xu T, Sun L T 2015 Small 11 3247
[2]	Hofmann S, Sharma R, Wirth C T, Sodi F C, Ducati C, Kasama T, Borkowski R E D, Drucker J, Bennett P, Robertson J 2008 Nature Mater. 7 372
[3]	Kodambaka S, Tersoff J, Reuter M C, Ross F M 2007 Science 316 729
[4]	Wang L H, Teng J, Liu P, Hirata A, Ma E, Zhang Z, Chen M W, Han X D 2014 Nat. Commun. 5 4402
[5]	Hannon J B, Kodambaka S, Ross F M, Tromp R M 2006 Nature 440 69
[6]	Ross F M, Tersoff J, Reuter M C 2005 Phys. Rev. Lett. 95 146104
[7]	Wang L H, Han X D, Liu P, Yue Y H, Zhang Z, Ma E 2010 Phys. Rev. Lett. 105 135501
[8]	Gamalski A D, Ducati C, Hofmann S J 2011 Phys. Chem. C 115 4413
[9]	Huang J Y, Chen S, Wang Z Q, Kempa K, Wang Y M, Jo S H, Chen G, Dresselhaus M S, Ren Z F 2006 Nature 439 281
[10]	Poncharal P, Wang Z L, Ugarte D, de Heer W A 1999 Science 283 1513
[11]	Filleter T, Bernal R, Li S, Espinosa H D 2011 Adv. Mater. 23 2855
[12]	Han X D, Wang L H, Yue Y H, Zhang Z 2015 Ultramicroscopy 151 94
[13]	Huang J Y, Zhong L, Wang C M, Sullivan J P, Xu W, Zhang L Q, Mao S X, Hudak N S, Liu X H, Subramanian A, Fan H Y, Qi L A, Kushima A, Li J 2010 Science 330 1515
[14]	Zhu C Y, Xu F, Min H H, Huang Y, Xia W W, Wang Y T, Xu Q Y, Gao P, Sun L T 2017 Adv. Funct. Mater. 27 1606163
[15]	Cha D, Ahn S J, Park S Y, Horii H, Kim D H, Kim Y K, Park S O, Jung U I, Kim M J, Kim J 2009 2009 Symposium on VLSI Technology Honolulu, USA, June 16-18, 2009 p204
[16]	Kwon D K, Kim K M, Jang J H, Jeon J M, Lee M H, Kim G H, Li X S, Park G S, Lee B, Han S, Kim M, Hwang C S 2010 Nat. Nanotechnol. 5 148
[17]	Lehmann M, Lichte H 2002 Microsc. Microanal. 8 447
[18]	Li H Y, Tee B C K, Cha J J, Cui Y, Chung J W, Lee S Y, Bao Z N 2012 J. Am. Chem. Soc. 134 2760
[19]	Makarova T L 2001 Semiconductors 35 243
[20]	Dekker C 1999 Phys. Today 52 22
[21]	Ogawa K, Kato T, Ikegami A, Tsuji H, Aoki N, Ochiai Y, Bird J P 2006 Appl. Phys. Lett. 88 112109
[22]	Nigam A, Schwabegger G, Ulla M, Ahmed R, Fishchuk I I, Kadashchuk A, Simbrunner C, Sitter H, Premaratne M, Rao V R 2012 Appl. Phys. Lett. 101 083305
[23]	Xing Y J, Jing G Y, Xu J, Yu D P, Liu H B, Li Y L 2005 Appl. Phys. Lett. 87 263117
[24]	Mikawa M, Kato H, Okumura M, Narazaki M, Kanazawa Y, Miwa N, Shinohara H 2001 Bioconjugate Chem. 12 510
[25]	Yoo C S, Nellis W J 1991 Science 254 1489
[26]	Minato J, Miyazawa K 2006 Diamond Relat. Mater. 15 1151
[27]	Liu H, Li Y, Jiang L, Luo H, Xiao S, Fang H, Li H, Zhu D, Yu D, Xu J, Xiang B 2002 J. Am. Chem. Soc. 124 13370
[28]	Minato J I, Miyazawa K, Suga T 2005 Sci. Technol. Adv. Mat. 6 272
[29]	Asaka K, Nakayama T, Miyazawa K, Saito Y 2012 Carbon 50 1209
[30]	Yang Y, Niu N N, Li C, Yao Y, Piao G Z, Yu R C 2012 Nanoscale 4 7460
[31]	Li C, Wang B Z, Yao Y, Piao G Z, Gu L, Wang Y G, Duan X F, Yu R C 2014 Nanoscale 6 6585
[32]	Wang L, Liu B B, Li H, Yang W G, Ding Y, Sinogeikin S V, Meng Y, Liu Z X, Zeng X C, Mao W L 2012 Science 337 825
[33]	Baik S J, Lim K S 2011 2011 IEEE International Reliability Physics Symposium (IRPS) Monterey, USA, April 10-14, 2011 p6B.4.1
[34]	Lwin Z Z, Pey K L, Liu C, Liu Q, Zhang Q, Chen Y N, Singh P K, Mahapatra S 2011 Appl. Phys. Lett. 99 222102
[35]	Zhu C X, Xu Z G, Huo Z L, Yang R, Zheng Z W, Cui Y X, Liu J, Wang Y M, Shi D X, Zhang G Y, Li F H, Liu M 2011 Appl. Phys. Lett. 99 223504
[36]	Lin Z, Bremond G, Bassani F 2011 Nanoscale Res. Lett. 6 163
[37]	Fiorenza P, Polspoel W, Vandervorst W 2006 Appl. Phys. Lett. 88 222104
[38]	Yao Y, Li C, Huo Z L, Liu M, Zhu C X, Gu C Z, Duan X F, Wang Y G, Gu L, Yu R C 2013 Nature Commun. 4 2764
[39]	Jeno C S, Ranganath T R, Jones H S, Chang T T L 1981 IEDM 27 388
[40]	Liang M S, Chang C, Tong Y, Hu C, Brodersen R W 1984 IEEE Trans. Electron Dev. 31 1238
[41]	Shibuya K, Dittmann R, Mi S, Waser R 2010 Adv. Mater. 22 411
[42]	Dimaria D J, Cartier E, Arnold D 1993 J. Appl. Phys. 73 3367
[43]	Su J, Wu E Y 2004 Phys. Rev. Lett. 92 087601
[44]	Xiong K, Robertson J 2005 Microelectron. Eng. 80 408
[45]	Onishi K, Choi R, Kang C S, Cho H J, Kim Y H, Nich R E, Han J, Krishnan S A, Akbar M S, Lee J C 2003 IEEE Trans. Electron Dev. 50 1517
[46]	Houssa M, Pantisano L, Ragnarsson L , Degraeve R, Schram T, Pourtois G, Gendt S D, Groeseneken G, Heyns M M 2006 Mater. Sci. Eng. R 51 37
[47]	Zafar S, Kumar A, Gusev E, Cartier E 2005 IEEE Trans. Device Mat. Re. 5 45
[48]	Valov I, Linn E, Tappertzhofen S, Schmelzer S, van den Hurk J, Lentz F, Waser R 2013 Nat. Commun. 4 1771
[49]	Jang J H, Jung H S, Kim J H, Lee S Y, Hwang C S, Kim M 2011 J. Appl. Phys. 109 023718
[50]	Li C, Yao Y, Shen X, Wang Y G, Li J J, Gu C Z, Yu R C, Liu Q, Liu M 2015 Nano Res. 8 3571
[51]	Liu Q, Long S B, L H B, Wang W, Niu J B, Huo Z L, Chen J N, Liu M 2010 ACS Nano 4 6162
[52]	Tian H, Chen H Y, Gao B, Yu S M, Liang J L, Yang Y, Xie D, Kang J F, Ren T L, Zhang Y G, Wong H S P 2013 Nano Lett. 13 651
[53]	Celano U, Goux L, Degraeve R, Fantini A, Richard O, Bender H, Jurczak M, Vandervorst W 2015 Nano Lett. 15 7970
[54]	Liu Q, Sun J, L H B, Long S B, Yin K B, Wan N, Li Y T, Sun L T, Liu M 2012 Adv. Mater. 24 1844
[55]	Celano U, Goux L, Belmonte A, Opsomer K, Franquet A, Schulze A, Detavernier C, Richard O, Bender H, Jurczak M, Vandervorst W 2014 Nano Lett. 14 2401
[56]	Chen J Y, Huang C W, Chiu C H, Huang Y T, Wu W W 2015 Adv. Mater. 27 5028
[57]	Park G S, Kim Y B, Park S Y, Li X S, Heo S, Lee M J, Chang M, Kwon J H, Kim M, Chung U I, Dittmann R, Waser R, Kim K 2013 Nature Commun. 4 2382
[58]	Miao F, Strachan J P, Yang J J, Zhang M X, Goldfarb I, Torrezan A C, Eschbach P, Kelley R D, Ribeiro G M, Williams R S 2011 Adv. Mater. 23 5633
[59]	Chen J Y, Hsin C L, Huang C W, Chiu C H, Huang Y T, Lin S J, Wu W W, Chen L J 2013 Nano Lett. 13 3671
[60]	Yang Y C, Gao P, Gaba S, Chang T, Pan X Q, Lu W 2012 Nature Commun. 3 732
[61]	Strachan J P, Pickett M D, Yang J J, Aloni S, Kilcoyne A L D, Ribeiro G M, Williams R S 2010 Adv. Mater. 22 3573
[62]	Waser R, Dittmann R, Staikov G, Szot K 2009 Adv. Mater. 21 2632
[63]	Yang Y, L W, Yao Y, Sun J, Gu C, Gu L, Wang Y, Duan X, Yu R 2014 Sci. Rep. 4 3890
[64]	Li C, Gao B, Yao Y, Guan X X, Shen X, Wang Y G, Huang P, Liu L F, Liu X Y, Li J J, Gu C Z, Kang J F, Yu R C 2017 Adv. Mater. 29 1602976

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Vol. 67, Issue 12 - 2018-06-20

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