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中国物理学会期刊
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LI Jiale, HAN Mingyue, LUO Yang, WU Yiyan, YANG Hao, LI Liuhe. Influence of pulse duration on plasma characteristics in HiPIMS dischargeJ. Acta Physica Sinica, 2026, 75(10): 100503. DOI: 10.7498/aps.75.20251748
Citation: LI Jiale, HAN Mingyue, LUO Yang, WU Yiyan, YANG Hao, LI Liuhe. Influence of pulse duration on plasma characteristics in HiPIMS dischargeJ. Acta Physica Sinica, 2026, 75(10): 100503. DOI: 10.7498/aps.75.20251748
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Influence of pulse duration on plasma characteristics in HiPIMS discharge

Acta Phys. Sin., 2026, 75(10): 100503.
DOI: 10.7498/aps.75.20251748
CSTR: 32037.14.aps.75.20251748
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