Diffraction property of multi-layer dielectric gratings studied by rigorous coupled-wave analysis
Acta Physica Sinica
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Acta Phys. Sin.  2008, Vol. 57 Issue (8): 4904-4910    
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Diffraction property of multi-layer dielectric gratings studied by rigorous coupled-wave analysis
Kong Wei-Jin1, Yun Mao-Jin1, Sun Xin1, Liu Jun-Hai1, Fan Zheng-Xiu2, Shao Jian-Da2
(1)青岛大学物理科学学院,青岛 266071; (2)中国科学院上海光学精密机械研究所,上海 201800
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