Study on nanohardness of helium-implanted 4H-SiC
Acta Physica Sinica
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Acta Phys. Sin.  2010, Vol. 59 Issue (6): 4130-4135    
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search  |   
Study on nanohardness of helium-implanted 4H-SiC
Zhang Chong-Hong1, Zhang Yong2, Zhou Li-Hong2, Li Bing-Sheng2, Yang Yi-Tao2
(1)中国科学院近代物理研究所,兰州 730000; (2)中国科学院近代物理研究所,兰州 730000;中国科学院研究生院,北京 100049
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