DESIGN OF SOFT X-RAY MULTILAYERS FOR SHORTER WAVELENGTHS

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DESIGN OF SOFT X-RAY MULTILAYERS FOR SHORTER WAVELENGTHS

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SHAO JIAN-DA, YI KUI, FAN ZHENG-XIU, WANG RUN-WEN, CUI MING-QI

Acta Phys. Sin., 1997, 46(11): 2258-2266.

Abstract
This paper discussed a method of designing soft X-ray multilayers for shorter wavelengths and showed that a difference between the designing of longer wavelength soft X-ray multilayers and that of the shorter one.For the latter,the minimum continuous thickness of the metal layer have to be considered.The method of second order designing could be a way to deposit high-quality multilayer mirrors for shorter wavelengths.The measured reflectivity of a Mo/Si multilayer for 4.47nm is also reported.
Authors and contacts
SHAO JIAN-DA²,

YI KUI²,

FAN ZHENG-XIU²,

WANG RUN-WEN²,

CUI MING-QI¹

(1)中国科学院高能物理研究所; (2)中国科学院上海光学精密机械研究所
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