Transmission grating efficiencies for soft X-ray and quantum efficiencies of X-ray CCD in the energy range of 100-1500eV were carefully calibrated on Beijing Synchrotron Radiation Facility. A model is developed to simulate the calibrated grating efficiencies, another model is developed to calculate the CCD quantum efficiencies. The effect of CCD surface contamination on CCD quantum efficiency is also studied. Finally, a method for unfolding the soft X-ray spectrum measured with transmission grating spectrometer is introduced, in which the grating efficiencies, CCD quantum efficiencies and grating higher order overlapping have been taken into account. The developed quantitative measurement method has been applied to obtain X-ray spectrum from gold plasma.
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