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The laser-focused atomic deposition is a new way to build the nano transfer standard of high reliability adequate for application. Based on the semi-classical model, this paper starts from the motion equation of chromium atom in the laser standing wave field to get the trajectory of the atoms in the standing wave field by analytical simulation. The effects on focal line features are discussed as a result of the angular collimation, velocity spread in the atomic beam and the spherical aberration. The effects from different deposition positions are also discussed. This paper also gives a sample of the grating structure nanofabricated by laser focusing of Cr atoms.
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