Using high temperatures and ultrasonic, ultrasonic bonding is one of the main methods in the wire bonding technology of the MEMS. The vibrations of transducer were tested. Based on the phase reconstruction theory, identification of the nonlinear characteristics was developed. In comparison with the time series along the axial direction, pitching direction and the horizontal direction, the correlated dimensions have been calculated, clearly describing the nonlinear dynamic characteristics of the transducer. It is helpful for understanding of transducer and can be used as a guide for modeling of this complicated structure.
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