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Study of nonlinear identification of time series of vibration on transducer in ultrasonic bonding system

Song Ai-Jun Han Lei

Study of nonlinear identification of time series of vibration on transducer in ultrasonic bonding system

Song Ai-Jun, Han Lei
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Publishing process
  • Received Date:  25 August 2006
  • Accepted Date:  10 December 2006
  • Published Online:  20 July 2007

Study of nonlinear identification of time series of vibration on transducer in ultrasonic bonding system

  • 1. 中南大学机电工程学院,长沙 410083

Abstract: Using high temperatures and ultrasonic, ultrasonic bonding is one of the main methods in the wire bonding technology of the MEMS. The vibrations of transducer were tested. Based on the phase reconstruction theory, identification of the nonlinear characteristics was developed. In comparison with the time series along the axial direction, pitching direction and the horizontal direction, the correlated dimensions have been calculated, clearly describing the nonlinear dynamic characteristics of the transducer. It is helpful for understanding of transducer and can be used as a guide for modeling of this complicated structure.

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