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Multi-beam laser heterodyne measurement with ultra-precision for the glass thickness based on oscillating mirror sinusoidal modulation

Li Yan-Chao Wang Chun-Hui Gao Long Cong Hai-Fang Qu Yang

Multi-beam laser heterodyne measurement with ultra-precision for the glass thickness based on oscillating mirror sinusoidal modulation

Li Yan-Chao, Wang Chun-Hui, Gao Long, Cong Hai-Fang, Qu Yang
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  • Abstract views:  2013
  • PDF Downloads:  522
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Publishing process
  • Received Date:  30 March 2011
  • Accepted Date:  11 May 2011
  • Published Online:  05 February 2012

Multi-beam laser heterodyne measurement with ultra-precision for the glass thickness based on oscillating mirror sinusoidal modulation

  • 1. National Key Laboratory of Tunable Laser Technology, Harbin Institute of Technology, Harbin 150001, China
Fund Project:  Project supported by the National Natural Science Foundation of China (Grant No:61078063) and the Harbiin Institute of Technology Incubation Progam of major international science and technology cooperation (Grant No. HIT. ICRST2010024).

Abstract: In this paper, We propose a novel method of measuring glass thickness by means of multi-beam laser heterodyne. Based on the Doppler effect and the heterodyne technology, loading the information about the glass thickness into the frequency difference of the multi-beam laser heterodyne signals by sinusoidal frequency modulation of the oscillating mirror that is in a simple harmonic motion, we can simultaneously obtain many values of the glass thickness through the multi-beam laser heterodyne signal demodulation. Processing these values by weighted-average, the glass thickness can be obtained accurately. This novel method is used to simulate the measurements for different glass thicknesses by MATLAB, the obtained result shows that the relative measurement error obtained by using this method is just 0.008%.

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