In this paper, textured (100) diamond films are successfully grown on single crystalline (100) silicon substrate by bias enhanced hot filament chemical vapor deposition from a gas mixture of methane and hydrogen. The films show the well defined facet and are identified to be textured films by means of scanning electron microscopy, Raman spectroscopy and X-ray diffraction analysis. The effects of various parameters have been systematically investigated and the optimum conditions of films growth have been obtained.