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中国物理学会期刊

多晶Si0.9654Mn0.0346:B薄膜的磁性研究

CSTR: 32037.14.aps.57.7262

Ferromagnetism in polycrystalline Si0.9654Mn0.0346:B thin films

CSTR: 32037.14.aps.57.7262
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  • 利用磁控溅射和快速热处理的方法制备了Mn,B共掺的多晶硅薄膜(Si0.9654Mn0.0346:B).磁性和结构研究发现薄膜有两个铁磁相.低温铁磁相来源于杂相Mn4Si7,高温铁磁相(居里温度TC~250K)是由Mn原子掺杂进入Si晶格导致.晶化后的薄膜利用射频等离子体增强化学气相沉积系统(PECVD)进行短暂(4min)的氢化处理后发现,薄膜的微结构没有发生变化而饱和磁化强度却随着

     

    Polycrystalline Si0.9654Mn0.0346 films codoped with boron have been prepared by rf magnetron sputtering deposition followed by fast thermal processing for crystallization. Magnetic property investigation indicated that the film consists of two ferromagnetic phases. The low Curie temperature ferromagnetic phase (TC~50K) is due to the Mn4Si7 phase in the film as detected by X-ray diffraction (XRD), while the high temperature phase (TC~250K) results from the incorporation of Mn into silicon. The polycrystalline thin films were treated by hydrogen passivation for about 4 minutes using radio-frequency plasma enhanced chemical vapor deposition (PECVD). After hydrogenation, the saturation magnetization increases with the increase of hole concentration in the films. The magnetic properties are closely related to the transport properties of the polycrystalline Si0.9654Mn0.0346 films, which suggests a mechanism of hole-mediated ferromagnetism in Si-based diluted magnetic semiconductors.

     

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