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热电堆红外探测器主要是由热电偶为基本单元所构成的一种探测器件, 因其原理简单、工作时不需要冷却设备等优势已被广泛应用在生产生活的各个方面. 然而, 传统热电堆器件所选用材料的吸收率通常处在较低水平, 并且大部分与微加工工艺不兼容. 在此, 本文设计提出了一种带有垂直石墨烯(vertical graphene, VG)的金属热电堆红外探测器. 通过等离子体增强化学气相沉积(plasma enhanced chemical vapor deposition, PECVD)生长VG并将其保留在器件的热结处, 从而实现热电堆红外探测器的宽带和高响应特性. 这种复合结构的探测器在波长792 nm的情况下, 室温响应率最高可达1.53 V/W, 与没有VG的热电堆红外探测器相比, 前后响应结果可增加28倍左右, 响应时间缩短至0.8 ms左右. 该制备过程与微加工工艺相兼容, 同时整体提升了器件性能, 并适合于大规模生产. 此外, 利用表面等离激元共振的原理将VG与金属纳米颗粒相互结合, 发现在前后同等条件下材料的光吸收有明显的增强, 所产生的热电势响应最高可增6倍. 以上结果表明, VG在多种应用中具有巨大的潜力, 包括光电检测、微发电装置等, 该技术为制备高性能热电堆红外探测器和其他传感器件提供了一种新的途径.Thermopile infrared detector is a kind of detector device mainly composed of thermocouple as the basic unit. Because of its simple principle, no need of cooling equipment, and other advantages, it has been widely used in various fields of production and life. However, the absorption rates of the materials in conventional thermopile devices are poor, and the majority of them are incompatible with microfabrication methods. In this work, a metal thermopile infrared detector with vertical graphene (VG) is designed and fabricated. The VG is grown via plasma enhanced chemical vapor deposition, and retained at the device’s thermal ends to provide the thermopile IR detector’s wideband and high response characteristics. The detector achieves a room temperature responsivity reaching a value as high as 1.53 V/W at 792 nm, which can increase the response results about 28 times and reduce the response time to 0.8 ms compared with the thermopile detector without VG. After systematically measuring the response results, it is finally found that there are three main mechanisms responsible for the response on the composite device. The first one is the response generated by the metal thermopile itself alone. The second one is the response increased eventually by the contribution of VG covered at the metal thermal junction that expands the temperature difference. The last one is the response generated by the temperature gradient existing inside the VG on the surface of the device after the absorption of heat. The portion of each partial response mechanism in the total response is also analyzed, providing a new reference direction for analyzing the response generation mechanism of thermopile detectors with other absorbing materials. The process is compatible with the microfabrication, while the device performance is enhanced and suitable for mass production. Furthermore, by utilizing the surface plasmon resonance to combine VG with metal nanoparticles, the material’s light absorption is found to be enhanced significantly under the same conditions, and the resulting thermal voltage can be increased to 6 times. The results indicate that VG promises to possess practical applications, in many fields such as photoelectric sensing and power production devices. This technology provides a new method to manufacture high-performance thermopile infrared detectors and other sensor devices.
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Keywords:
- vertical graphene /
- thermopiles /
- infrared detectors /
- surface plasmon resonance








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