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中国物理学会期刊

高温超导YBCO薄膜制备与结构表征数据的标准化收集与治理方法

Standardized Data Collection and Governance for Fabrication and Structural Characterization of High-Temperature Superconducting YBCO Thin-Films

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  • 高温超导钇钡铜氧(YBa2Cu3O7-δ,YBCO)薄膜是高温超导电子学领域的战略级材料,其微观结构和超导性能强烈依赖于制备工艺、氧含量及缺陷状态等因素。当前,YBCO薄膜研发与规模化制备过程中仍普遍存在实验数据标准缺失、过程信息采集不完整、多源异构数据难以融合、样品与数据全链路追溯不足等问题,制约了高质量工艺数据库构建及数据驱动优化方法的应用。针对上述瓶颈,本文面向器件应用需求,提出了一套覆盖“薄膜制备—结构表征—数据治理—电子实验记录归档”的YBCO薄膜全流程标准化数据收集与治理方法。该方法在脉冲激光沉积(pulsed laser deposition,PLD)生长环节构建多模态数据采集架构,其中温度和真空度由两路独立相机进行连续采集,并通过时间窗口匹配与线性插值重构实现时间对齐;激光羽辉图像则利用激光器输出的TTL信号进行硬件触发采集,实现羽辉图像与激光脉冲事件的同步记录;在表征环节集成机器人送样、智能任务调度与多模式XRD自动测试流程,实现样品流转、测试参数、衍射原始数据及样品标识的自动绑定。进一步地,本文构建Raw–Processed–Merged三层数据存储与治理架构,在完整保留原始实验证据的基础上,通过光学字符识别(optical characterrecognition,OCR)后处理、物理规则校验、异常筛查、时间窗口匹配与线性插值重构等策略,实现多源异步数据的清洗、标准化与统一时间轴融合。在此基础上,本文构建了面向YBCO薄膜制备与表征的多模态实验数据库,统一组织实验元数据、温度与真空度时序数据、羽辉图像、XRD表征文件及ELN记录。依托结构化元数据模型和电子实验记录本(electronic laboratory notebook,ELN)接口,将过程时序数据、表征文件、多媒体附件及追溯标识封装为可检索、可审计的实验记录,形成从分析结果反向追踪至原始视频、OCR识别结果和实验操作过程的闭环溯源体系。该体系将传统依赖人工经验和离散记录的实验流程转化为标准化、结构化、机器可读的数据资产,为开展YBCO薄膜工艺—结构关系研究、构建高保真实验数据库,并为后续进一步融合超导性能数据及开展数据驱动研究提供数据基础。本文数据集可在科学数据银行数据库https://doi.org/10.57760/sciencedb.j00213.0008l中访问获取。(数据集私有访问链接: https://www.scidb.cn/s/F7rMJb)

     

    High-temperature superconducting yttrium barium copper oxide (YBa2Cu3O7-δ, YBCO) thin-films are important materials for high-temperature superconducting electronics. Their microstructure and superconducting properties are highly sensitive to fabrication conditions, oxygen content, and defect states. However, the lack of standardized experimental data, incomplete process information, difficulties in integrating heterogeneous data, and insufficient sample-to-data traceability hinder the development of high-quality process databases and data-driven optimization methods. To address these challenges, this work proposes a standardized data collection and governance method covering the fabrication and structural characterization of YBCO thin-films. During pulsed laser deposition (PLD), temperature and vacuum-pressure readings are continuously recorded using two independent cameras and temporally aligned through time-window matching and linear interpolation. Laser plume images are acquired through hardware triggering by the laser's TTL signal, enabling synchronization with laser pulse events. For structural characterization, robotic sample delivery, intelligent task scheduling, and automated multi-mode X-ray diffraction (XRD) testing are integrated to associate sample identifiers, testing parameters, and raw diffraction data. A three-layer Raw – Processed – Merged data storage and governance architecture is also developed. Original experimental evidence is preserved, while multi-source asynchronous data are cleaned, standardized, and integrated through optical character recognition (OCR) post-processing, physical-rule validation, anomaly screening, time-window matching, and linear interpolation. The processed data are aligned on a unified time axis and organized into structured datasets for subsequent analysis. Based on this framework, a multimodal experimental database is established to integrate experimental metadata, temperature and vacuum time-series data, plume images, XRD characterization files, and electronic laboratory notebook (ELN) records. A structured metadata model and ELN interface support searchable experimental records and end-to-end traceability from analytical results to original videos, OCR outputs, and experimental operations. The proposed framework transforms fragmented experimental records into standardized, structured, and machine-readable data assets, providing a foundation for studying process–structure relationships in YBCO thin-films and supporting future data-driven research. The datasets presented in this paper, including temperature and vacuum time-series data, laser plume images, XRD characterization data, and ELN records, are available at https://doi.org/10.57760/sciencedb.j00213.0008l (private access link: https://www.scidb.cn/s/F7rMJb).

     

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