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中国物理学会期刊

双轴错配应变对铁电双栅负电容晶体管性能的影响

CSTR: 32037.14.aps.72.20222190

Effect of biaxial misfit strain on properties of ferroelectric double gate negative capacitance transistors

CSTR: 32037.14.aps.72.20222190
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  • 提出了双轴错配应变调节的对称双栅负电容场效应晶体管的电学特性的解析模型, 然后基于该模型对比研究了铁电层厚度和双轴错配应变分别对基于PbZr0.5Ti0.5O3和CuInP2S6材料的两种负电容场效应晶体管的电学性能的影响. 结果表明: 对于基于PbZr0.5Ti0.5O3的负电容场效应晶体管, 当增加其铁电层厚度或施加压缩应变时, 其亚阈值摆幅和导通电流得到改善, 但施加拉伸应变具有相反的作用. 对于基于CuInP2S6的负电容场效应晶体管, 在增加铁电层厚度或施加拉伸应变时性能有所改善, 但器件在压缩应变下是滞后的. 比较两者发现, 在低栅极电压下, 基于CuInP2S6的负电容场效应晶体管比基于PbZr0.5Ti0.5O3的负电容场效应晶体管表现出更好的性能.

     

    In order to continue Moore’s law, the reduction of power consumption has received much attention. It is necessary to develop steep devices that can overcome the “Boltzmann tyranny” and solve the problem of high power consumption of integrated circuits. Negative capacitance field-effect transistors are one of the most promising candidates in numerous steep devices. Strain engineering has been widely studied as an effective means of regulating the properties of ferroelectric thin films. However, the influence of strain on the performance of negative capacitance field-effect transistor has not been clear so far. Therefore, in this work, an analytical model of double gate negative capacitance field-effect transistor (DG-NCFET) regulated by biaxial misfit strain is proposed. Using this model, we investigate the influences of ferroelectric layer thickness and biaxial misfit strain on electrical properties of PbZr0.5Ti0.5O3 (PZT)-based and CuInP2S6 (CIPS)-based negative capacitance field-effect transistors (NCFETs), respectively. The results show that for the negative capacitance field-effect transistor based on PbZr0.5Ti0.5O3, when the ferroelectric layer thickness is increased or the compression strain is applied, the subthreshold swing and conduction current are improved, but the tensile strain has the opposite effect. For the negative capacitance field-effect transistor based on CuInP2S6, its performance is improved when the thickness of the ferroelectric layer is increased or the tensile strain is applied, but the device lags behind under the compressive strain. It is found that the CIPS-based NCFET exhibits better performance than PZT-based NCFET at low gate voltages.

     

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