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中国物理学会期刊
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CAI TIAN-HAI. DEFECTS ETCHING PITS OBSERVATIONS AND ANALYSES ON EPITAXIAL SILICON CLEAVAGE SURFACEJ. Acta Physica Sinica, 1980, 29(2): 265-269. DOI: 10.7498/aps.29.265
Citation: CAI TIAN-HAI. DEFECTS ETCHING PITS OBSERVATIONS AND ANALYSES ON EPITAXIAL SILICON CLEAVAGE SURFACEJ. Acta Physica Sinica, 1980, 29(2): 265-269. DOI: 10.7498/aps.29.265
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DEFECTS ETCHING PITS OBSERVATIONS AND ANALYSES ON EPITAXIAL SILICON CLEAVAGE SURFACE

Acta Phys. Sin., 1980, 29(2): 265-269.
DOI: 10.7498/aps.29.265
CSTR: 32037.14.aps.29.265
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