ELLIPSOMETRIC SPECTRA OF SiO<sub>2</sub> FILMS ON SILICON

MO DANG; CHEN SHU-GUANG; YU YU-ZHEN; HUANG BING-ZHONG

doi:10.7498/aps.29.673

MO DANG, CHEN SHU-GUANG, YU YU-ZHEN, HUANG BING-ZHONG. ELLIPSOMETRIC SPECTRA OF SiO2 FILMS ON SILICONJ. Acta Physica Sinica, 1980, 29(5): 673-676. DOI: 10.7498/aps.29.673

Citation:

MO DANG, CHEN SHU-GUANG, YU YU-ZHEN, HUANG BING-ZHONG. ELLIPSOMETRIC SPECTRA OF SiO2 FILMS ON SILICONJ. Acta Physica Sinica, 1980, 29(5): 673-676. DOI: 10.7498/aps.29.673

Citation:

MO DANG, CHEN SHU-GUANG, YU YU-ZHEN, HUANG BING-ZHONG. ELLIPSOMETRIC SPECTRA OF SiO2 FILMS ON SILICONJ. Acta Physica Sinica, 1980, 29(5): 673-676. DOI: 10.7498/aps.29.673