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中国物理学会期刊
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ZENG QING-CHENG. MICROSCOPIC OBSERVATION OF DIFFUSION DISTRIBUTION OF IONIZED IMPURITIES IN SILICONJ. Acta Physica Sinica, 1981, 30(2): 249-253. DOI: 10.7498/aps.30.249
Citation: ZENG QING-CHENG. MICROSCOPIC OBSERVATION OF DIFFUSION DISTRIBUTION OF IONIZED IMPURITIES IN SILICONJ. Acta Physica Sinica, 1981, 30(2): 249-253. DOI: 10.7498/aps.30.249
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MICROSCOPIC OBSERVATION OF DIFFUSION DISTRIBUTION OF IONIZED IMPURITIES IN SILICON

Acta Phys. Sin., 1981, 30(2): 249-253.
DOI: 10.7498/aps.30.249
CSTR: 32037.14.aps.30.249
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