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中国物理学会期刊
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XIMEN JI-YE, LI YU. DYNAMIC ABERRATION CORRECTION IN A COMBINED SCANNING ELECTRON BEAM SYSTEMJ. Acta Physica Sinica, 1982, 31(12): 37-43. DOI: 10.7498/aps.31.37
Citation: XIMEN JI-YE, LI YU. DYNAMIC ABERRATION CORRECTION IN A COMBINED SCANNING ELECTRON BEAM SYSTEMJ. Acta Physica Sinica, 1982, 31(12): 37-43. DOI: 10.7498/aps.31.37
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DYNAMIC ABERRATION CORRECTION IN A COMBINED SCANNING ELECTRON BEAM SYSTEM

Acta Phys. Sin., 1982, 31(12): 37-43.
DOI: 10.7498/aps.31.37
CSTR: 32037.14.aps.31.37
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