STUDY OF HYDROGEN-INDUCED DEFECTS IN FLOATING ZONE SILICON GROWN IN HYDROGEN ATMOSPHERE

MAI ZHEN-HONG; CUI SHU-FAN; LIN JIAN; Lü YAN

doi:10.7498/aps.33.921

Search

x

MAI ZHEN-HONG, CUI SHU-FAN, LIN JIAN, Lü YAN. STUDY OF HYDROGEN-INDUCED DEFECTS IN FLOATING ZONE SILICON GROWN IN HYDROGEN ATMOSPHEREJ. Acta Physica Sinica, 1984, 33(7): 921-926. DOI: 10.7498/aps.33.921

Citation:

MAI ZHEN-HONG, CUI SHU-FAN, LIN JIAN, Lü YAN. STUDY OF HYDROGEN-INDUCED DEFECTS IN FLOATING ZONE SILICON GROWN IN HYDROGEN ATMOSPHEREJ. Acta Physica Sinica, 1984, 33(7): 921-926. DOI: 10.7498/aps.33.921

Citation:

MAI ZHEN-HONG, CUI SHU-FAN, LIN JIAN, Lü YAN. STUDY OF HYDROGEN-INDUCED DEFECTS IN FLOATING ZONE SILICON GROWN IN HYDROGEN ATMOSPHEREJ. Acta Physica Sinica, 1984, 33(7): 921-926. DOI: 10.7498/aps.33.921