Search

x
中国物理学会期刊
Advanced Search
FEI QING-YU, HUANG BING-ZHONG. THE TOTAL VOLUME FRACTION OF VOIDS OF RF SPUTTERED AMORPHOUS SILICONJ. Acta Physica Sinica, 1985, 34(11): 1413-1421. DOI: 10.7498/aps.34.1413
Citation: FEI QING-YU, HUANG BING-ZHONG. THE TOTAL VOLUME FRACTION OF VOIDS OF RF SPUTTERED AMORPHOUS SILICONJ. Acta Physica Sinica, 1985, 34(11): 1413-1421. DOI: 10.7498/aps.34.1413
shu

THE TOTAL VOLUME FRACTION OF VOIDS OF RF SPUTTERED AMORPHOUS SILICON

Acta Phys. Sin., 1985, 34(11): 1413-1421.
DOI: 10.7498/aps.34.1413
CSTR: 32037.14.aps.34.1413
PDF
导出引用

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return