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中国物理学会期刊
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WANG WAN-LU, LIAO KE-JUN. STRESS STUDIES OF AMORPHOUS a-Si:H/a-SiNx:H HETEROJUNCTIONS AND a-Si:H, a-SiNx:H FILMSJ. Acta Physica Sinica, 1987, 36(12): 1529-1537. DOI: 10.7498/aps.36.1529
Citation: WANG WAN-LU, LIAO KE-JUN. STRESS STUDIES OF AMORPHOUS a-Si:H/a-SiNx:H HETEROJUNCTIONS AND a-Si:H, a-SiNx:H FILMSJ. Acta Physica Sinica, 1987, 36(12): 1529-1537. DOI: 10.7498/aps.36.1529
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STRESS STUDIES OF AMORPHOUS a-Si:H/a-SiNx:H HETEROJUNCTIONS AND a-Si:H, a-SiNx:H FILMS

Acta Phys. Sin., 1987, 36(12): 1529-1537.
DOI: 10.7498/aps.36.1529
CSTR: 32037.14.aps.36.1529
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