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中国物理学会期刊
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ZHANG PEI-XIAN, YAO JIE, PENG SHAO-QI. THE COMPENSATION OF DEFECTS AND DOPING IN LPCVD a-Si FILMSJ. Acta Physica Sinica, 1987, 36(12): 1538-1544. DOI: 10.7498/aps.36.1538
Citation: ZHANG PEI-XIAN, YAO JIE, PENG SHAO-QI. THE COMPENSATION OF DEFECTS AND DOPING IN LPCVD a-Si FILMSJ. Acta Physica Sinica, 1987, 36(12): 1538-1544. DOI: 10.7498/aps.36.1538
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THE COMPENSATION OF DEFECTS AND DOPING IN LPCVD a-Si FILMS

Acta Phys. Sin., 1987, 36(12): 1538-1544.
DOI: 10.7498/aps.36.1538
CSTR: 32037.14.aps.36.1538
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