SILICON FILM DEPOSITED BY LASER-PLASMA

FU GUANG-SHENG; HAN LI; LI XIAO-WEI; ZHANG LIAN-SHUI; DONG LI-FANG; LU FU-RUN; XUE CHUN-YIN

doi:10.7498/aps.36.293

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FU GUANG-SHENG, HAN LI, LI XIAO-WEI, ZHANG LIAN-SHUI, DONG LI-FANG, LU FU-RUN, XUE CHUN-YIN. SILICON FILM DEPOSITED BY LASER-PLASMAJ. Acta Physica Sinica, 1987, 36(3): 293-300. DOI: 10.7498/aps.36.293

Citation:

FU GUANG-SHENG, HAN LI, LI XIAO-WEI, ZHANG LIAN-SHUI, DONG LI-FANG, LU FU-RUN, XUE CHUN-YIN. SILICON FILM DEPOSITED BY LASER-PLASMAJ. Acta Physica Sinica, 1987, 36(3): 293-300. DOI: 10.7498/aps.36.293

Citation:

FU GUANG-SHENG, HAN LI, LI XIAO-WEI, ZHANG LIAN-SHUI, DONG LI-FANG, LU FU-RUN, XUE CHUN-YIN. SILICON FILM DEPOSITED BY LASER-PLASMAJ. Acta Physica Sinica, 1987, 36(3): 293-300. DOI: 10.7498/aps.36.293