OPTICAL PROPERTIES OF THE a-Si:H/a-SiNx:H SUPERLATTICE FILMS

WANG ZHI-CHAO; LIU XIANG-NA; FENG XIAO-MIE; GENG XI-SHENG

doi:10.7498/aps.37.189

WANG ZHI-CHAO, LIU XIANG-NA, FENG XIAO-MIE, GENG XI-SHENG. OPTICAL PROPERTIES OF THE a-Si:H/a-SiNx:H SUPERLATTICE FILMSJ. Acta Physica Sinica, 1988, 37(2): 189-196. DOI: 10.7498/aps.37.189

Citation:

WANG ZHI-CHAO, LIU XIANG-NA, FENG XIAO-MIE, GENG XI-SHENG. OPTICAL PROPERTIES OF THE a-Si:H/a-SiNx:H SUPERLATTICE FILMSJ. Acta Physica Sinica, 1988, 37(2): 189-196. DOI: 10.7498/aps.37.189

Citation:

WANG ZHI-CHAO, LIU XIANG-NA, FENG XIAO-MIE, GENG XI-SHENG. OPTICAL PROPERTIES OF THE a-Si:H/a-SiNx:H SUPERLATTICE FILMSJ. Acta Physica Sinica, 1988, 37(2): 189-196. DOI: 10.7498/aps.37.189