AUGER ELECTRON SPECTROSCOPIC STUDIES OF INTERFA CE AND BURIED LAYER OF SOI STRUCTURE FORMED BY ION IMPLANTATION

YU YUE-HUI; LIN CHENG-LU; ZHANG SHUN-KAI; FANG ZI-ZEI; ZOU SHI-CHANG

doi:10.7498/aps.38.1996

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YU YUE-HUI, LIN CHENG-LU, ZHANG SHUN-KAI, FANG ZI-ZEI, ZOU SHI-CHANG. AUGER ELECTRON SPECTROSCOPIC STUDIES OF INTERFA CE AND BURIED LAYER OF SOI STRUCTURE FORMED BY ION IMPLANTATIONJ. Acta Physica Sinica, 1989, 38(12): 1996-2002. DOI: 10.7498/aps.38.1996

Citation:

YU YUE-HUI, LIN CHENG-LU, ZHANG SHUN-KAI, FANG ZI-ZEI, ZOU SHI-CHANG. AUGER ELECTRON SPECTROSCOPIC STUDIES OF INTERFA CE AND BURIED LAYER OF SOI STRUCTURE FORMED BY ION IMPLANTATIONJ. Acta Physica Sinica, 1989, 38(12): 1996-2002. DOI: 10.7498/aps.38.1996

Citation:

YU YUE-HUI, LIN CHENG-LU, ZHANG SHUN-KAI, FANG ZI-ZEI, ZOU SHI-CHANG. AUGER ELECTRON SPECTROSCOPIC STUDIES OF INTERFA CE AND BURIED LAYER OF SOI STRUCTURE FORMED BY ION IMPLANTATIONJ. Acta Physica Sinica, 1989, 38(12): 1996-2002. DOI: 10.7498/aps.38.1996