PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMA

ZHU WEN-HAO; ZHU NAN-QIANG; CHEN YUE-SHAN

doi:10.7498/aps.38.236

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ZHU WEN-HAO, ZHU NAN-QIANG, CHEN YUE-SHAN. PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMAJ. Acta Physica Sinica, 1989, 38(2): 236-246. DOI: 10.7498/aps.38.236

Citation:

ZHU WEN-HAO, ZHU NAN-QIANG, CHEN YUE-SHAN. PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMAJ. Acta Physica Sinica, 1989, 38(2): 236-246. DOI: 10.7498/aps.38.236

Citation:

ZHU WEN-HAO, ZHU NAN-QIANG, CHEN YUE-SHAN. PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMAJ. Acta Physica Sinica, 1989, 38(2): 236-246. DOI: 10.7498/aps.38.236