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中国物理学会期刊
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MA DE-LU, SHANG DE-YING, YU JIN-HUA. XRD STUDY OF N2+ IMPLANTED SiJ. Acta Physica Sinica, 1989, 38(4): 579-585. DOI: 10.7498/aps.38.579
Citation: MA DE-LU, SHANG DE-YING, YU JIN-HUA. XRD STUDY OF N2+ IMPLANTED SiJ. Acta Physica Sinica, 1989, 38(4): 579-585. DOI: 10.7498/aps.38.579
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XRD STUDY OF N2+ IMPLANTED Si

Acta Phys. Sin., 1989, 38(4): 579-585.
DOI: 10.7498/aps.38.579
CSTR: 32037.14.aps.38.579
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