MECHANISM OF ION BEAM MIXING OF Mo LAYER ON Si

GAO WEN-YU; LI HONG-CHENG; WANG RUI-LAN; LIU JIA-RUI

doi:10.7498/aps.38.728

GAO WEN-YU, LI HONG-CHENG, WANG RUI-LAN, LIU JIA-RUI. MECHANISM OF ION BEAM MIXING OF Mo LAYER ON SiJ. Acta Physica Sinica, 1989, 38(5): 728-734. DOI: 10.7498/aps.38.728

Citation:

GAO WEN-YU, LI HONG-CHENG, WANG RUI-LAN, LIU JIA-RUI. MECHANISM OF ION BEAM MIXING OF Mo LAYER ON SiJ. Acta Physica Sinica, 1989, 38(5): 728-734. DOI: 10.7498/aps.38.728

Citation:

GAO WEN-YU, LI HONG-CHENG, WANG RUI-LAN, LIU JIA-RUI. MECHANISM OF ION BEAM MIXING OF Mo LAYER ON SiJ. Acta Physica Sinica, 1989, 38(5): 728-734. DOI: 10.7498/aps.38.728