TIME RESOLVED REFLECTIVITY MEASUREMENTS OF SOLID PHASE EPITAXY IN P2+ AND P+ IMPLANTED SILICON

FANG ZI-WEI; LIN CHENG-LU; YANG GEN-QING; LI XIAO-QIN; ZOU SHI-CHAN; R. G. ELLIMAN

doi:10.7498/aps.39.112

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FANG ZI-WEI, LIN CHENG-LU, YANG GEN-QING, LI XIAO-QIN, ZOU SHI-CHAN, R. G. ELLIMAN. TIME RESOLVED REFLECTIVITY MEASUREMENTS OF SOLID PHASE EPITAXY IN P2+ AND P+ IMPLANTED SILICONJ. Acta Physica Sinica, 1990, 39(7): 112-118. DOI: 10.7498/aps.39.112

Citation:

FANG ZI-WEI, LIN CHENG-LU, YANG GEN-QING, LI XIAO-QIN, ZOU SHI-CHAN, R. G. ELLIMAN. TIME RESOLVED REFLECTIVITY MEASUREMENTS OF SOLID PHASE EPITAXY IN P2+ AND P+ IMPLANTED SILICONJ. Acta Physica Sinica, 1990, 39(7): 112-118. DOI: 10.7498/aps.39.112

Citation:

FANG ZI-WEI, LIN CHENG-LU, YANG GEN-QING, LI XIAO-QIN, ZOU SHI-CHAN, R. G. ELLIMAN. TIME RESOLVED REFLECTIVITY MEASUREMENTS OF SOLID PHASE EPITAXY IN P2+ AND P+ IMPLANTED SILICONJ. Acta Physica Sinica, 1990, 39(7): 112-118. DOI: 10.7498/aps.39.112