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中国物理学会期刊
SONG RU-AN, CHENG XIAN-AN, ZHOU ZHONG-YI. MAGNETIC FIELD ASSISTED MICROWAVE PLASMA AND LARGE AREA DIAMOND FILM DEPOSITIONJ. Acta Physica Sinica, 1990, 39(10): 1635-1639. DOI: 10.7498/aps.39.1635
Citation: SONG RU-AN, CHENG XIAN-AN, ZHOU ZHONG-YI. MAGNETIC FIELD ASSISTED MICROWAVE PLASMA AND LARGE AREA DIAMOND FILM DEPOSITIONJ. Acta Physica Sinica, 1990, 39(10): 1635-1639. DOI: 10.7498/aps.39.1635

MAGNETIC FIELD ASSISTED MICROWAVE PLASMA AND LARGE AREA DIAMOND FILM DEPOSITION

CSTR: 32037.14.aps.39.1635
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