A STUDY ON THE METASTABLE THERMAL DEFECTS IN REACTIVELY SPUTTERED a-SiGe:H FILMS

WANG YIN-YUE; ZHANG FANG-QING; CHEN GUANG-HUA

doi:10.7498/aps.39.1661

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WANG YIN-YUE, ZHANG FANG-QING, CHEN GUANG-HUA. A STUDY ON THE METASTABLE THERMAL DEFECTS IN REACTIVELY SPUTTERED a-SiGe:H FILMSJ. Acta Physica Sinica, 1990, 39(10): 1661-1664. DOI: 10.7498/aps.39.1661

Citation:

WANG YIN-YUE, ZHANG FANG-QING, CHEN GUANG-HUA. A STUDY ON THE METASTABLE THERMAL DEFECTS IN REACTIVELY SPUTTERED a-SiGe:H FILMSJ. Acta Physica Sinica, 1990, 39(10): 1661-1664. DOI: 10.7498/aps.39.1661

Citation:

WANG YIN-YUE, ZHANG FANG-QING, CHEN GUANG-HUA. A STUDY ON THE METASTABLE THERMAL DEFECTS IN REACTIVELY SPUTTERED a-SiGe:H FILMSJ. Acta Physica Sinica, 1990, 39(10): 1661-1664. DOI: 10.7498/aps.39.1661