DIAMOND-LIKE CARBON FILMS IMPLANTED WITH VARIOUS ION ENERGY

XIANG JIN-ZHONG; ZHENG ZHI-HAO; XIONG JING; ZHANG FENG-QING

doi:10.7498/aps.39.420

XIANG JIN-ZHONG, ZHENG ZHI-HAO, XIONG JING, ZHANG FENG-QING. DIAMOND-LIKE CARBON FILMS IMPLANTED WITH VARIOUS ION ENERGYJ. Acta Physica Sinica, 1990, 39(3): 420-423. DOI: 10.7498/aps.39.420

Citation:

XIANG JIN-ZHONG, ZHENG ZHI-HAO, XIONG JING, ZHANG FENG-QING. DIAMOND-LIKE CARBON FILMS IMPLANTED WITH VARIOUS ION ENERGYJ. Acta Physica Sinica, 1990, 39(3): 420-423. DOI: 10.7498/aps.39.420

Citation:

XIANG JIN-ZHONG, ZHENG ZHI-HAO, XIONG JING, ZHANG FENG-QING. DIAMOND-LIKE CARBON FILMS IMPLANTED WITH VARIOUS ION ENERGYJ. Acta Physica Sinica, 1990, 39(3): 420-423. DOI: 10.7498/aps.39.420