ZHU DE-ZHANG, PAN HAO-CHANG, CAO JIAN-QING, ZHU FU-YING, CHEN GUO-MING, CHEN GUO-LIANG, YANG JIE, ZOU SHI-CHANG. STUDY ON LOW ENERGY ION BEAM NITRIDATION OF Si BY HIGH RESOLUTION CHANNELING-BACKSCATTERINGJ. Acta Physica Sinica, 1990, 39(8): 96-99. DOI: 10.7498/aps.39.96
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Citation:
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ZHU DE-ZHANG, PAN HAO-CHANG, CAO JIAN-QING, ZHU FU-YING, CHEN GUO-MING, CHEN GUO-LIANG, YANG JIE, ZOU SHI-CHANG. STUDY ON LOW ENERGY ION BEAM NITRIDATION OF Si BY HIGH RESOLUTION CHANNELING-BACKSCATTERINGJ. Acta Physica Sinica, 1990, 39(8): 96-99. DOI: 10.7498/aps.39.96
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ZHU DE-ZHANG, PAN HAO-CHANG, CAO JIAN-QING, ZHU FU-YING, CHEN GUO-MING, CHEN GUO-LIANG, YANG JIE, ZOU SHI-CHANG. STUDY ON LOW ENERGY ION BEAM NITRIDATION OF Si BY HIGH RESOLUTION CHANNELING-BACKSCATTERINGJ. Acta Physica Sinica, 1990, 39(8): 96-99. DOI: 10.7498/aps.39.96
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Citation:
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ZHU DE-ZHANG, PAN HAO-CHANG, CAO JIAN-QING, ZHU FU-YING, CHEN GUO-MING, CHEN GUO-LIANG, YANG JIE, ZOU SHI-CHANG. STUDY ON LOW ENERGY ION BEAM NITRIDATION OF Si BY HIGH RESOLUTION CHANNELING-BACKSCATTERINGJ. Acta Physica Sinica, 1990, 39(8): 96-99. DOI: 10.7498/aps.39.96
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