THE EFFECTS OF NITROGEN CONTENT OF a-SiNx:H ON THE INTERFACE PROPERTIES IN a-Si:H/a-SiNx:H SUPERLATTICES

ZHU MEI-FANG; ZONG JUN; ZHANG XIU-ZEN

doi:10.7498/aps.40.253

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ZHU MEI-FANG, ZONG JUN, ZHANG XIU-ZEN. THE EFFECTS OF NITROGEN CONTENT OF a-SiNx:H ON THE INTERFACE PROPERTIES IN a-Si:H/a-SiNx:H SUPERLATTICESJ. Acta Physica Sinica, 1991, 40(2): 253-261. DOI: 10.7498/aps.40.253

Citation:

ZHU MEI-FANG, ZONG JUN, ZHANG XIU-ZEN. THE EFFECTS OF NITROGEN CONTENT OF a-SiNx:H ON THE INTERFACE PROPERTIES IN a-Si:H/a-SiNx:H SUPERLATTICESJ. Acta Physica Sinica, 1991, 40(2): 253-261. DOI: 10.7498/aps.40.253

Citation:

ZHU MEI-FANG, ZONG JUN, ZHANG XIU-ZEN. THE EFFECTS OF NITROGEN CONTENT OF a-SiNx:H ON THE INTERFACE PROPERTIES IN a-Si:H/a-SiNx:H SUPERLATTICESJ. Acta Physica Sinica, 1991, 40(2): 253-261. DOI: 10.7498/aps.40.253