MICROSTRUCTURE OF SiOxNy THIN FILMS AND A NEW MODEL FOR THE CURRENT TRANSPORT MECHANISM

YANG BING-LIANG; LIU BAI-YONG; CHEN DOU-NAN; Y. C. CHENG

doi:10.7498/aps.40.289

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YANG BING-LIANG, LIU BAI-YONG, CHEN DOU-NAN, Y. C. CHENG. MICROSTRUCTURE OF SiOxNy THIN FILMS AND A NEW MODEL FOR THE CURRENT TRANSPORT MECHANISMJ. Acta Physica Sinica, 1991, 40(2): 289-296. DOI: 10.7498/aps.40.289

Citation:

YANG BING-LIANG, LIU BAI-YONG, CHEN DOU-NAN, Y. C. CHENG. MICROSTRUCTURE OF SiOxNy THIN FILMS AND A NEW MODEL FOR THE CURRENT TRANSPORT MECHANISMJ. Acta Physica Sinica, 1991, 40(2): 289-296. DOI: 10.7498/aps.40.289

Citation:

YANG BING-LIANG, LIU BAI-YONG, CHEN DOU-NAN, Y. C. CHENG. MICROSTRUCTURE OF SiOxNy THIN FILMS AND A NEW MODEL FOR THE CURRENT TRANSPORT MECHANISMJ. Acta Physica Sinica, 1991, 40(2): 289-296. DOI: 10.7498/aps.40.289