INFLUENCE OF THE INCIDENCE ANGLE OF THE ION-BOMBARDMENT ON THE SPUTTERING PARAMETERS

SHAO QI-YUN; HUO YU-KUN; CHEN JIAN-XIN; WU SHI-MING; PAN ZHENG-YING

doi:10.7498/aps.40.659

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SHAO QI-YUN, HUO YU-KUN, CHEN JIAN-XIN, WU SHI-MING, PAN ZHENG-YING. INFLUENCE OF THE INCIDENCE ANGLE OF THE ION-BOMBARDMENT ON THE SPUTTERING PARAMETERSJ. Acta Physica Sinica, 1991, 40(4): 659-666. DOI: 10.7498/aps.40.659

Citation:

SHAO QI-YUN, HUO YU-KUN, CHEN JIAN-XIN, WU SHI-MING, PAN ZHENG-YING. INFLUENCE OF THE INCIDENCE ANGLE OF THE ION-BOMBARDMENT ON THE SPUTTERING PARAMETERSJ. Acta Physica Sinica, 1991, 40(4): 659-666. DOI: 10.7498/aps.40.659

Citation:

SHAO QI-YUN, HUO YU-KUN, CHEN JIAN-XIN, WU SHI-MING, PAN ZHENG-YING. INFLUENCE OF THE INCIDENCE ANGLE OF THE ION-BOMBARDMENT ON THE SPUTTERING PARAMETERSJ. Acta Physica Sinica, 1991, 40(4): 659-666. DOI: 10.7498/aps.40.659