MeV PROTON ELASTIC BACKSCATTERING ANALYSIS OF SiNx/Si AND SiOx/Si FILMS

ZHU FEI-RAN; JIANG WEI-LIN; XU TIAN-BING; YIN SHI-DUAN

doi:10.7498/aps.41.2049

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ZHU FEI-RAN, JIANG WEI-LIN, XU TIAN-BING, YIN SHI-DUAN. MeV PROTON ELASTIC BACKSCATTERING ANALYSIS OF SiNx/Si AND SiOx/Si FILMSJ. Acta Physica Sinica, 1992, 41(12): 2049-2054. DOI: 10.7498/aps.41.2049

Citation:

ZHU FEI-RAN, JIANG WEI-LIN, XU TIAN-BING, YIN SHI-DUAN. MeV PROTON ELASTIC BACKSCATTERING ANALYSIS OF SiNx/Si AND SiOx/Si FILMSJ. Acta Physica Sinica, 1992, 41(12): 2049-2054. DOI: 10.7498/aps.41.2049

Citation:

ZHU FEI-RAN, JIANG WEI-LIN, XU TIAN-BING, YIN SHI-DUAN. MeV PROTON ELASTIC BACKSCATTERING ANALYSIS OF SiNx/Si AND SiOx/Si FILMSJ. Acta Physica Sinica, 1992, 41(12): 2049-2054. DOI: 10.7498/aps.41.2049