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中国物理学会期刊
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WANG YIN-YUE, XU HUAI-ZHE, CHEN GUANG-HUA. INVESTIGATION ON THERMAL STABILITY OF REACTIVE- SPUTTERING a-Si:H/a-Ge:H SUPERLATTICESJ. Acta Physica Sinica, 1992, 41(2): 302-305. DOI: 10.7498/aps.41.302
Citation: WANG YIN-YUE, XU HUAI-ZHE, CHEN GUANG-HUA. INVESTIGATION ON THERMAL STABILITY OF REACTIVE- SPUTTERING a-Si:H/a-Ge:H SUPERLATTICESJ. Acta Physica Sinica, 1992, 41(2): 302-305. DOI: 10.7498/aps.41.302
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INVESTIGATION ON THERMAL STABILITY OF REACTIVE- SPUTTERING a-Si:H/a-Ge:H SUPERLATTICES

Acta Phys. Sin., 1992, 41(2): 302-305.
DOI: 10.7498/aps.41.302
CSTR: 32037.14.aps.41.302
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