A STUDY OF SECONDARY DEFECTS IN ION- IMPLANTED InSb

TIAN REN-HE; LU WU-XING; LI ZHU-HUAI; GAO YU-ZUN

doi:10.7498/aps.41.809

TIAN REN-HE, LU WU-XING, LI ZHU-HUAI, GAO YU-ZUN. A STUDY OF SECONDARY DEFECTS IN ION- IMPLANTED InSbJ. Acta Physica Sinica, 1992, 41(5): 809-813. DOI: 10.7498/aps.41.809

Citation:

TIAN REN-HE, LU WU-XING, LI ZHU-HUAI, GAO YU-ZUN. A STUDY OF SECONDARY DEFECTS IN ION- IMPLANTED InSbJ. Acta Physica Sinica, 1992, 41(5): 809-813. DOI: 10.7498/aps.41.809

Citation:

TIAN REN-HE, LU WU-XING, LI ZHU-HUAI, GAO YU-ZUN. A STUDY OF SECONDARY DEFECTS IN ION- IMPLANTED InSbJ. Acta Physica Sinica, 1992, 41(5): 809-813. DOI: 10.7498/aps.41.809